Conference paper
Nanoporous materials integration into advanced microprocessors
E. Todd Ryan, Cathy Labelle, et al.
MRS Spring Meeting 2005
No abstract available.
E. Todd Ryan, Cathy Labelle, et al.
MRS Spring Meeting 2005
Hoi Chan, Thomas Kwok
ICAC 2007
Trieu C. Chieu, Thao Nguyen, et al.
SCC 2007
Thomas Kwok
SPIE Microelectronic Processing 1992