U. Gerlach-Meyer, J.W. Coburn, et al.
Journal of Applied Physics
No abstract available.
U. Gerlach-Meyer, J.W. Coburn, et al.
Journal of Applied Physics
Harold F. Winters, J.W. Coburn, et al.
Journal of Applied Physics
F. Fracassi, E. Occhiello, et al.
Journal of Applied Physics
J.W. Coburn
Plasma Chemistry and Plasma Processing