Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We present resonant coherent small-angle scattering from sub-μm magnetic domains in an in-line holography geometry. By varying the polarization of the incident soft x rays the interference between the reference wave propagating from a pinhole and scattered object wave can be switched “on” or “off.” The reference-object interference contribution in the scattering can be isolated by combining measurements with right and left circular polarizations. The implications for spatial and temporal interference experiments of magnetic specimen such as holography, lensless imaging, or photon correlation spectroscopy are discussed. © 2003 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Hiroshi Ito, Reinhold Schwalm
JES
J.K. Gimzewski, T.A. Jung, et al.
Surface Science
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting