E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Paper
Pressure and plasma effects on the properties of magnetron sputtered carbon films
Abstract
No abstract available.
Related
Conference paper
Compression for data archiving and backup revisited
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Paper
The DX centre
T.N. Morgan
Semiconductor Science and Technology
T. Schneider, E. Stoll
Physical Review B