Pressure and plasma effects on the properties of magnetron sputtered carbon films

Paper

01 Jul 1987

Abstract

No abstract available.

Conference paper

Joy Y. Cheng, Daniel P. Sanders, et al.

SPIE Advanced Lithography 2008

Paper

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Solid State Communications

Review

David B. Mitzi

Journal of Materials Chemistry

Paper

P. Alnot, D.J. Auerbach, et al.

Surface Science