William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Self-consistent solutions for quasi-one-dimensional electron states in a narrow inversion layer channel at a GaAs/AlGaAs heterointerface have been obtained for a structure with a split gate. A simple model for fixed charge at the exposed surface in the gate opening has been used in the calculation. Energy levels for lateral motion are separated by ∼1-5 meV for the example considered, with a 0.4 μm gate opening. © 1987.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films