Conference paper
A multilevel copper/low-k/airgap BEOL technology
S.V. Nitta, S. Ponoth, et al.
ADMETA 2007
A device is presented that sweeps out programmable optical delays of 300 ps (or less) at 30 Hz, with shorter-delay scans possible at much higher rates. It is compact, vibration-free, linear to within 0.02%, and has a position repeatability of 1 part in 105. With this scanner and a PC-based signal-averaging data acquisition system, ultrafast autocorrelation measurements with very high signal/noise are demonstrated in both the fs and ps domains.
S.V. Nitta, S. Ponoth, et al.
ADMETA 2007
A. Grill, V.V. Patel, et al.
MRS Fall Meeting 1996
R. Rosenberg, D. Edelstein, et al.
Annual Review of Materials Science
D. Edelstein, A. Jog, et al.
IITC 2025