Reduction of positional errors in a four-point probe resistance measurement

A method for reducing resistance errors in a collinear four-point probe resistance measurement of a thin film was presented. The positional errors were eliminated to first order using a linear combination of two measurements which differ by interchange of the I- and V-leads. A substantial reduction in absolute error from 3.4% down to 0.01%-0.1%, and an improvement in precision by a factor of 2-4 were shown. The application of the technique to the current-in-plane tunneling method was discussed.