Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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AAAI 2025
Charles A Micchelli
Journal of Approximation Theory
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Photomask and Next-Generation Lithography Mask Technology 2004