Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Tunneling to a spherical metal tip is analyzed, going beyond the s-wave approximation for the tip wave functions. For metal surfaces, the scanning tunneling microscope image is found to correspond to a contour of constant surface local density of states, under rather general assumptions. However, for semimetallic or semiconducting surfaces, the image may deviate in a simple but crucial way from the local density of states, as illustrated by the case of graphite. © 1990 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001