Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.Z. Sun
Journal of Applied Physics
David B. Mitzi
Journal of Materials Chemistry
A. Krol, C.J. Sher, et al.
Surface Science