Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The existence of defects in amorphous semiconductors is itself an problem of fundamental interest. Conventional approaches accept their existence only phenomenologically. We described a new approach to defining and understanding defects. The existence of defects is a natural outgrowth of our thermodynamical ensemble theory of electronic states in disordered systems. Specific properties are also predicted through properties of thermodynamic ensembles and the relationship between defect electronic properties and structural energies. Thus we obtain directly electronic properties without a need for detailed microscopic information. © 1987.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R. Ghez, J.S. Lew
Journal of Crystal Growth
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials