Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
The development trends in CMOS technology are discussed. It is clear that the trend in putting more and more transistors and memory bits on a chip will continue. The integration level will soon reach a point where the characteristics of a system are determined by the functional components on a single chip. There is likely to be detours on the technology roadmap, each driven by a different emphasis on the system functions implemented on a chip. While scaling CMOS transistors for density and performance will continue, there will be plenty of opportunities for improvement in system performance without pushing CMOS transistors to their limits. © 1997 Elsevier Science S.A.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
R.W. Gammon, E. Courtens, et al.
Physical Review B
Dipanjan Gope, Albert E. Ruehli, et al.
IEEE T-MTT