XY table and tilting stage for scanning electron microscope (SEM)

Oliver C. Wells

doi:10.1063/1.1134018

Review of Scientific Instruments

Paper

02 Sep 2008

XY table and tilting stage for scanning electron microscope (SEM)

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Abstract

This paper describes a low-vibration specimen stage in which the specimen is held by a block which slides on Teflon pads over the lower surface of the SEM lens. It provides X, Y, and tilting motions.

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Use of backscattered electron detector arrays for forming backscattered electron images in the scanning electron microscope

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Examination of uncoated photoresist by the low-loss electron method in the scanning electron microscope

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Effects of collector take‐off angle and energy filtering on the BSE image in the SEM

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Abstract

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Applications of image diagnostics to metrology quality assurance and process control

Use of backscattered electron detector arrays for forming backscattered electron images in the scanning electron microscope

Examination of uncoated photoresist by the low-loss electron method in the scanning electron microscope

Effects of collector take‐off angle and energy filtering on the BSE image in the SEM