Anisotropic etching of a novalak-based polymer at cryogenic temperature
- R. Hsiao
- K. Yu
- et al.
- 1997
- JES
Paper
Publications
58 results for Scott A. MacDonald
Submicron trackwidth and stripe height MR sensor test structures
- Robert E. Fontana
- Scott A. MacDonald
- et al.
- 1996
- IEEE Transactions on Magnetics
PaperChemical Amplification in High-Resolution Imaging Systems
- Scott A. MacDonald
- C. Grant Willson
- et al.
- 1994
- Accounts of Chemical Research
PaperPhotosensitive Tetramethylpiperidine Urethanes: Synthesis and Characterization
- Stefano Martina
- Scott A. MacDonald
- et al.
- 1994
- Journal of Organic Chemistry
PaperAirborne Contamination of a Chemically Amplified Resist. 2. Effect of Polymer Film Properties on Contamination Rate
- William D. Hinsberg
- Scott A. MacDonald
- et al.
- 1994
- Chemistry of Materials
PaperPositive tone dry-develop resist based on cross-linking a phenolic resin
- Scott A. MacDonald
- C.B. Larson
- et al.
- 1993
- Microlithography 1993
Conference paperInfluence of polymer properties on airborne chemical contamination of chemically amplified resists
- W.D. Hinsberg
- Scott A. MacDonald
- et al.
- 1993
- Microlithography 1993
Conference paperResist materials design: Base-catalyzed chemical amplification
- C.G. Wilison
- J.F. Cameron
- et al.
- 1993
- Microlithography 1993
Conference paperRecent advances in chemically amplified resist materials
- C.G. Willson
- J.F. Cameron
- et al.
- 1992
- ACS PMSE 1992
Conference paperAirborne Contamination of a Chemically Amplified Resist. 1. Identification of Problem
- Scott A. MacDonald
- William D. Hinsberg
- et al.
- 1993
- Chemistry of Materials
Paper