Simultaneous Co-localized TiO2 Etching and W Atomic Layer Deposition Using WF6 as a Dual-Functional Reactant
- Hannah R. M. Margavio
- Noel Arellano
- et al.
- 2024
- Chemistry of Materials
Paper
Publications
26 results for Rudy J. Wojtecki
Reactive Vapor-Phase Inhibitors for Area-Selective Depositions at Tunable Critical Dimensions
- Lawal Adewale Ogunfowora
- Ishwar Singh
- et al.
- 2024
- JACS
PaperReworkable rehealable packaging materials from the introduction of orthogonal dynamic covalent chemistries
- Teddie Magbitang
- Lucas Moore
- et al.
- 2022
- ITherm 2022
Conference paperCharacterization of Non-Conductive Paste Materials (NCP) for Thermocompression Bonding in a Direct Bonded Heterogeneously Integrated (DBHi) Si- Bridge Package
- Akihiro Horibe
- Takahito Watanabe
- et al.
- 2022
- ECTC 2022
Conference paperArea-Selective Deposition of Tantalum Nitride with Polymerizable Monolayers: From Liquid to Vapor Phase Inhibitors
- Krystelle Lionti
- Noel Arellano
- et al.
- 2022
- Chemistry of Materials
PaperChemical and structural characterization of EUV photoresists as a function of depth by standing-wave x-ray photoelectron spectroscopy
- Giuseppina Conti
- Henrique P. Martins
- et al.
- 2021
- JM3
PaperSurface initiated polymer thin films for the area selective deposition and etching of metal oxides
- Thomas G. Pattison
- Alexander E. Hess
- et al.
- 2020
- ACS Nano
PaperInternal plasticization of poly(vinyl) chloride using glutamic acid as a branched linker to incorporate four plasticizers per anchor point
- Longbo Li
- Andy T. Tek
- et al.
- 2019
- J Polym Sci Part A
PaperExtending the compositional diversity of films in area selective atomic layer deposition through chemical functionalities
- Magi Mettry
- Alexander E. Hess
- et al.
- 2019
- JVSTA
PaperFifteen Nanometer Resolved Patterns in Selective Area Atomic Layer Deposition - Defectivity Reduction by Monolayer Design
- Rudy J. Wojtecki
- Magi Mettry
- et al.
- 2018
- ACS AMI
Paper