Characterization of thin dielectric films as copper diffusion barriers using triangular voltage sweep
- S. Cohen
- J.C. Liu
- et al.
- 1999
- MRS Spring Meeting 1999
Paper
Publications
15 results for Joyce C. Liu
Characterization of thin dielectric films as copper diffusion barriers using triangular voltage sweep
- S. Cohen
- J.C. Liu
- et al.
- 1999
- MRS Spring Meeting 1999
Conference paperIntegration issues for diamond like carbon in a copper damascene process flow
- A. Grill
- C.V. Jahnes
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperUse of simulations of 15N profiling in studying hydrogen segregation at interfaces
- A.D. Marwick
- Joyce C. Liu
- et al.
- 1992
- Nuclear Inst. and Methods in Physics Research, B
PaperHydrogen redistribution and gettering in AlCu/Ti thin films
- A.D. Marwick
- Joyce C. Liu
- et al.
- 1991
- Journal of Applied Physics
PaperSputter deposition of dense diamond-like carbon films at low temperature
- Jerome J. Cuomo
- James P. Doyle
- et al.
- 1991
- Applied Physics Letters
PaperHydrogen segregation and trapping in the Al/Si(111) interface
- Joyce C. Liu
- A.D. Marwick
- et al.
- 1991
- Physical Review B
PaperIon-beam sputtered diamond-like carbon with densities of 2.9 g/cc
- Jerome J. Cuomo
- John Bruley
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperEpitaxy of (100) Cu on (100) Si by evaporation near room temperatures: In-plane epitaxial relation and channeling analysis
- Chin-An Chang
- Joyce C. Liu
- et al.
- 1990
- Applied Physics Letters
PaperKinetic description of the transition from a one-phase to a two-phase growth regime in Al/Pd lateral diffusion couples
- B. Blanpain
- J.W. Mayer
- et al.
- 1990
- Journal of Applied Physics
Paper