Disruptive non-fluorinated photoacid generators using computational chemistry and library design
- P. Labeaume
- K. Hernandez
- et al.
- 2024
- SPIE Advanced Lithography 2024
Conference paper
Publications
11 results for James F. Cameron
A new breed of wet-developable BARC materials
- Libor Vyklicky
- Wu-Song Huang
- et al.
- 2009
- J. Photopolym. Sci. Tech.
PaperPhotogenerated Base in Resist and Imaging Materials: Design of Functional Polymers Susceptible to Base Catalyzed Decarboxylation
- Jean M. J. Fréchet
- Man-Kit Leung
- et al.
- 1997
- Chemistry of Materials
PaperPhotogeneration of amines from α-keto carbamates: Design and preparation of photoactive compounds
- James F. Cameron
- C. Grant Willson
- et al.
- 1997
- Journal of the Chemical Society - Perkin Transactions 1
PaperPhotogeneration of amines from α-keto carbamates: Photochemical studies
- James F. Cameron
- C. Grant Willson
- et al.
- 1996
- JACS
PaperNew photolabile amino protecting groups: Photogeneration of amines from [(3′,5′-dimethoxybenzoinyl)oxy]carbonyl carbamates
- James F. Cameron
- C. Grant Willson
- et al.
- 1995
- Journal of the Chemical Society, Chemical Communications
PaperDesign and Synthesis of Photoactive Polymer Systems Based on Amine-Catalyzed Intramolecular Imidization of Polymer Side Chains
- Man-Kit Leung
- Jean M. J. Fréchet
- et al.
- 1995
- Macromolecules
PaperResist materials design: Base-catalyzed chemical amplification
- C.G. Wilison
- J.F. Cameron
- et al.
- 1993
- Microlithography 1993
Conference paperRecent advances in chemically amplified resist materials
- C.G. Willson
- J.F. Cameron
- et al.
- 1992
- ACS PMSE 1992
Conference paperPhotogenerated base as catalyst for imidization reactions - A new design of photosensitive polymers
- J.M.J. Fréchet
- J.F. Cameron
- et al.
- 1993
- Polymer Bulletin
Paper