Process integration of self-assembled polymer templates into silicon nanofabrication
- K.W. Guarini
- C.T. Black
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
43 results for K.W. Guarini
Electrical integrity of state-of-the-art 0.13 μm SOI CMOS devices and circuits transferred for three-dimensional (3D) integrated circuit (IC) fabrication
- K.W. Guarini
- A. Topol
- et al.
- 2002
- IEDM 2002
Conference paperOptimization of diblock copolymer thin film self assembly
- K.W. Guarini
- C.T. Black
- et al.
- 2002
- Advanced Materials
PaperNanostructured organic-inorganic hybrid thin films
- P. Du
- J.S. Gutmann
- et al.
- 2002
- ACS National Meeting 2002
Conference paperA self-aligned silicide process utilizing ion implants for reduced silicon consumption and control of the silicide formation temperature
- G.M. Cohen
- C. Cabral Jr.
- et al.
- 2002
- MRS Proceedings 2002
Conference paperFormation of nanometer-scale dot arrays from diblock copolymer templates
- C.T. Black
- K.W. Guarini
- et al.
- 2002
- Materials Research Society Symposium - Proceedings
PaperA self-aligned silicide process for thin silicon-on-insulator MOSFETs and bulk MOSFETs with shallow junctions
- G.M. Cohen
- C. Cabral Jr.
- et al.
- 2001
- MRS Proceedings 2001
Conference paperNanoscale patterning using self-assembled polymers for semiconductor applications
- K.W. Guarini
- C.T. Black
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperMicrofabricated silicon solid immersion lens
- Daniel A. Fletcher
- Kenneth B. Crozier
- et al.
- 2001
- JMEMS
PaperIntegration of self-assembled diblock copolymers for semiconductor capacitor fabrication
- C.T. Black
- K.W. Guarini
- et al.
- 2001
- Applied Physics Letters
Paper