Publications

19 results for Martin Glodde

Trace-Gas Spectroscopy of Methane Using a Monolithically Integrated Silicon Photonic Chip Sensor
- - Eric J. Zhang
  - Yves Martin
  - et al.
- 2019
- CLEO 2019
Conference paper
Flip-chip III-V-to-silicon photonics interfaces for optical sensor
- - Yves Martin
  - Jason S. Orcutt
  - et al.
- 2019
- ECTC 2019
Conference paper
Monolithically integrated silicon photonic chip sensor for near-infrared trace-gas spectroscopy
- - Eric J. Zhang
  - Yves Martin
  - et al.
- 2019
- SPIE DCS 2019
Conference paper
Silicon Photonic Gas Sensing
- - William M. J. Green
  - Eric J. Zhang
  - et al.
- 2019
- OFC 2019
Conference paper
Silicon photonic integrated circuit for on-chip spectroscopic gas sensing
- - Chi Xiong
  - Yves Martin
  - et al.
- 2019
- SPIE OPTO 2019
Conference paper
The integration of 193i and DSA for BEOL metal cuts/blocks targeting sub-20nm tip-to-tip CD
- - Chi-Chun Liu
  - Yann Mignot
  - et al.
- 2018
- SPIE Advanced Lithography 2018
Conference paper
Unexpected impact of RIE gases on lithographic films
- - Martin Glodde
  - Robert L. Bruce
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Conference paper
Fundamentals of EUV resist-inorganic hardmask interactions
- - Dario Goldfarb
  - Martin Glodde
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Conference paper
Acid generation efficiency: EUV photons versus photoelectrons
- - Dario Goldfarb
  - Ali Afzali-Ardakani
  - et al.
- 2016
- SPIE Advanced Lithography 2016
Conference paper
Advanced wafer bonding and laser debonding
- - Paul Andry
  - Russell A. Budd
  - et al.
- 2014
- ECTC 2014
Conference paper