NanoStack Transistor Architecture for CMOS 7A Node and Beyond
- S. Reboh
- C. Zhang
- et al.
- 2025
- VLSI Technology and Circuits 2025
Conference paper
Publications
16 results for J. Wynne
Impact of Lot Arrival Density Fluctuations on Cycle Time Control IE: Industrial Engineering
- Masao Joko
- Kohei Miyaguchi
- et al.
- 2025
- ASMC 2025
Conference paperManufacturing Yield Improvement for Advanced CMOS Technology Middle-of-Line Interconnect with Cobalt Metallization : YE: YieldEnhancement/Learning
- Susan Fan
- P. Jamison
- et al.
- 2023
- ASMC 2023
Conference paperParasitic Resistance Reduction for Aggressively Scaled Stacked Nanosheet Transistors
- Su-Chen Fan
- Ruilong Xie
- et al.
- 2020
- IITC 2020
Conference paperStudy of TiN and TaN underlayer properties and their influence on W growth
- Shanti Pancharatnam
- Gabriel Rodriguez
- et al.
- 2019
- IEEE Trans Semicond Manuf
PaperEffect of chamber surface coat on TiN film growth
- Shanti Pancharatnam
- J. Wynne
- et al.
- 2019
- ASMC 2019
Conference paperStudy of titanium nitride underlayer properties and its influence on tungsten growth
- Shanti Pancharatnam
- J. Wynne
- et al.
- 2018
- ASMC 2018
Conference paperMethod of problem solving to diagnose high particle failures due to unique rotation stopping position: CFM: Contamination free manufacturing
- Jessica Gruss-Gifford
- T. Haigh
- et al.
- 2018
- ASMC 2018
Conference paperCMP Challenges for Advanced Technology Nodes
- John H Zhang
- Haigou Huang
- et al.
- 2017
- MRS Advances
PaperCopper contact metallization using Ru-based barrier liners for 45 nm and 32 nm nodes: Reliability and device performance
- Soon-Cheon Seo
- Chih-Chao Yang
- et al.
- 2008
- ADMETA 2008
Conference paper