Publications

2 results for F. Schnabel

New aqueous clean for aluminum interconnects: Part II. Applications
- - R. Ravikumar
  - D.L. Rath
  - et al.
- 2000
- Diffusion and Defect Data Pt.B: Solid State Phenomena
Conference paper
Cleans for Al vias in a 0.175 μm Dual Damascene Process
- - J.P. Gambino
  - L. Clevenger
  - et al.
- 1999
- IITC 1999
Conference paper