Mechanical and dielectric characterization of low-k, porous organosilicates
- Willi Volksen
- Teddie P. Magbitang
- et al.
- 2005
- VMIC 2005
Conference paper
Publications
156 results for Willi Volksen
Oriented nanoporous lamellar organosilicates templated from topologically unsymmetrical dendritic-linear block copolymers
- Teddie Magbitang
- Victor Y. Lee
- et al.
- 2005
- Angewandte Chemie - International Edition
PaperDetection of open or closed porosity in low-κ dielectrics by solvent diffusion
- Marcus A. Worsley
- Mark Roberts
- et al.
- 2005
- Microelectronic Engineering
PaperEffect of plasma interactions with low-κ films as a function of porosity, plasma chemistry, and temperature
- Marcus A. Worsley
- Stacey F. Bent
- et al.
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperPhase separation behavior of poly(methyl methacrylate-co-dimethylaminoethyl methacrylate)/methyl silsesquioxane hybrid nanocomposites studied by dansyl fluorescence
- Q.R. Huang
- Curtis W. Frank
- et al.
- 2005
- Chemistry of Materials
PaperSuccessful dual damascene integration of extreme low k materials (k < 2.0) using a novel gap fill based integration scheme
- S.V. Nitta
- S. Purushothaman
- et al.
- 2004
- IEDM 2004
Conference paperSupercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectrics
- J.A. Lubguban
- S. Gangopadhyay
- et al.
- 2004
- Journal of Materials Research
PaperTemplating organosilicate vitrification using unimolecular self-organizing polymers prepared from tandem ring opening and atom transfer radical polymerizations
- T. Magbitang
- V.Y. Lee
- et al.
- 2004
- Macromolecular Symposia
Conference paperA buckling-based metrology for measuring the elastic moduli of polymeric thin films
- Christopher M. Stafford
- Christopher Harrison
- et al.
- 2004
- Nature Materials
PaperToughening of nanoporous glasses using porogen residuals
- Daniel A. Maidenberg
- Willi Volksen
- et al.
- 2004
- Nature Materials
Paper