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- Sarah Nahar Chowdhury
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- 2026
- SPIE Advanced Lithography + Patterning 2026
Conference paper
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Multi-reticle stitching: Applications from packaging to High-NA EUV
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- Rick Johnson
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- 2025
- SPIE Advanced Lithography + Patterning 2025
Conference paperMonolithic Stacked FET with Stepped Channels for Future Logic Technologies
- Chen Zhang
- Seungmin Song
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- 2024
- IEDM 2024
Conference paper