Publications

3 results for Kebin Gu

Measuring Contact Hole Distributions for Use in Predicting Missing Contact Hole Rates
- - Elisa Novelli
  - Chris A. Mack
  - et al.
- 2026
- SPIE Advanced Lithography + Patterning 2026
Conference paper
Exploring the Limits of Contact Hole Patterning with High NA EUV Lithography
- - Dario Goldfarb
  - Zheng Chen
  - et al.
- 2026
- SPIE Advanced Lithography + Patterning 2026
Talk
Massive E-beam Metrology Characterization of Reticle Stitching Boundaries
- - Genevieve Kane
  - Connor Smith
  - et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
Talk