Publications

2 results for Chris A. Mack

Measuring Contact Hole Distributions for Use in Predicting Missing Contact Hole Rates
- - Elisa Novelli
  - Chris A. Mack
  - et al.
- 2026
- SPIE Advanced Lithography + Patterning 2026
Conference paper
Predicting and Measuring Scummed Contact Holes
- - Elisa Novelli
  - Chris A. Mack
  - et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
Conference paper