A multilevel copper/low-k/airgap BEOL technology
- S.V. Nitta
- S. Ponoth
- et al.
- 2007
- ADMETA 2007
Conference paper
Publications
49 results for E. Huang
Porous organosilicates low-dielectric films for high-frequency devices
- André Knoesen
- Ge Song
- et al.
- 2004
- Journal of Electronic Materials
PaperPorous ILD process development for sub 100nm integration
- K. Malone
- S.T. Chen
- et al.
- 2003
- ADMETA 2003
Conference paperPore morphologies in disordered nanoporous thin films
- Jonathan A. Hedstrom
- Michael F. Toney
- et al.
- 2003
- Langmuir
PaperMiscibility in organic/inorganic hybrid nanocomposites suitable for microelectronic applications: Comparison of modulated differential scanning calorimetry and fluorescence spectroscopy
- Q.R. Huang
- Ho-Cheol Kim
- et al.
- 2003
- Macromolecules
PaperPorosity in plasma enhanced chemical vapor deposited SiCoH dielectrics: A comparative study
- A. Grill
- V.V. Patel
- et al.
- 2003
- Journal of Applied Physics
PaperSupercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
- T. Rajagopalan
- B. Lahlouh
- et al.
- 2003
- Applied Physics Letters
PaperNeutron reflectivity on nanoporous poly(methylsilsesquioxane) thin films
- Ho-Cheol Kim
- Willi Volksen
- et al.
- 2003
- Chemistry of Materials
PaperSelective sorption of nanoporous poly(methyl silsesquioxane)
- Ho-Cheol Kim
- Jason B. Wilds
- et al.
- 2002
- Chemistry of Materials
PaperArchitectural disparity effects in the morphology of dendrimer-linear coil diblock copolymers
- Darrin J. Pochan
- Lisa Pakstis
- et al.
- 2002
- Macromolecules
Paper