Using Unentangled Oligomers to Toughen Materials
- Scott G. Isaacson
- Yusuke Matsuda
- et al.
- 2018
- ACS AMI
Paper
Publications
9 results for Theo Frot
Hyperconnected molecular glass network architectures with exceptional elastic properties
- Joseph A. Burg
- Mark S. Oliver
- et al.
- 2017
- Nature Communications
PaperInvestigation of plasma etch damage to porous oxycarbosilane ultra low-k dielectric
- Robert Bruce
- Sebastian Engelmann
- et al.
- 2013
- Journal of Physics D: Applied Physics
PaperImpact of low-k structure and porosity on etch processes
- Maxime Darnon
- Nicolas Casiez
- et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
PaperPost Porosity Plasma Protection applied to a wide range of ultra low-k materials
- Theo Frot
- Willi Volksen
- et al.
- 2012
- IITC 2012
Conference paperPost porosity plasma protection: Scaling of efficiency with porosity
- Theo Frot
- Willi Volksen
- et al.
- 2012
- Advanced Functional Materials
PaperPost Porosity Plasma Protection a new approach to integrate k 2.2 porous ULK materials
- Theo Frot
- Willi Volksen
- et al.
- 2011
- IITC/MAM 2011
Conference paperFuture of PECVD and spin-on ultra low-k materials
- Willi Volksen
- Theo Frot
- et al.
- 2011
- IITC/MAM 2011
Conference paperApplication of the protection/deprotection strategy to the science of porous materials
- Theo Frot
- Willi Volksen
- et al.
- 2011
- Advanced Materials
Paper