Experimental characterization of focusing by high-numerical-aperture zone plates
- Rajesh Menon
- Dario Gil
- et al.
- 2006
- Journal of the Optical Society of America A: Optics and Image Science, and Vision
Paper
Publications
16 results for Dario Gil
First microprocessors with immersion lithography
- D. Gil
- T. Bailey
- et al.
- 2005
- SPIE Advanced Lithography 2005
Conference paperProgress towards developing high performance immersion compatible materials and processes
- Karen Petrillo
- Kaushal Patel
- et al.
- 2005
- Microlithography 2005
Conference paperPhoton-sieve lithography
- Rajesh Menon
- Dario Gil
- et al.
- 2005
- Journal of the Optical Society of America A: Optics and Image Science, and Vision
PaperMaskless lithography
- Rajesh Menon
- Amil Patel
- et al.
- 2005
- Materials Today
PaperImmersion lithography: New opportunities for semiconductor manufacturing
- Darío Gil
- Timothy A. Brunner
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paper