Publications

24 results for Edmund M. Sikorski

Low voltage, scalable nanocrystal FLASH memory fabricated by templated self assembly
- - K.W. Guarini
  - C.T. Black
  - et al.
- 2003
- IEDM 2003
Conference paper
Process integration of self-assembled polymer templates into silicon nanofabrication
- - K.W. Guarini
  - C.T. Black
  - et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
New polysilicon disposable sidewall process for sub-50 nm CMOS
- - K.L. Lee
  - D. Boyd
  - et al.
- 2001
- ESSDERC 2001
Conference paper
Very high performance 50 nm CMOS at low temperature
- - S.J. Wind
  - L.T. Shi
  - et al.
- 1999
- IEDM 1999
Conference paper