Publications

49 results for Scott D. Halle

Low-n absorber EUV masks: mask manufacturing assessment through process characterization and optimization with early look at EUV Low-NA and High-NA imaging performance
- - Henry Kamberian
  - Jed Rankin
  - et al.
- 2024
- SPIE Photomask Technology + EUV Lithography 2024
Conference paper
Bayesian dropout approximation in deep learning neural networks: Analysis of self-Aligned quadruple patterning
- - Scott D. Halle
  - Derren N. Dunn
  - et al.
- 2022
- JM3
Paper
Focus considerations of design pitches and absorber choice for EUV random logic
- - Martin Burkhardt
  - Zheng Chen
  - et al.
- 2022
- OEN 2022
Conference paper
Predicting overlay mark performance based on process emulation and optical simulation
- - Sagarika Mukesh
  - Jack Wong
  - et al.
- 2022
- SPIE Advanced Lithography 2022
Conference paper
Bayesian dropout approximation in deep learning neural networks: Analysis of self-aligned quadruple patterning
- - Scott D. Halle
  - Max O. Bloomfield
  - et al.
- 2020
- SPIE Advanced Lithography 2020
Conference paper
Detection of Printable EUV Mask Absorber Defects and Defect Adders by Full Chip Optical Inspection of EUV Patterned Wafers
- - Luciana Meli
  - Ravi Bonam
  - et al.
- 2017
- IEEE Trans Semicond Manuf
Paper
Study of alternate hardmasks for extreme ultraviolet patterning
- - Anuja De Silva
  - Indira Seshadri
  - et al.
- 2016
- JVSTB
Paper
Methodology for determining critical dimension scanning electron microscope measurement condition of sub-20 nm resist patterns for 0.33 NA extreme ultraviolet lithography
- - Nobuhiro Okai
  - Erin Lavigne
  - et al.
- 2016
- J. Micro/Nanolithogr. MEMS MOEMS
Paper
Detection of printable EUV mask absorber defects and defect adders by full chip optical inspection of EUV patterned wafers
- - Luciana Meli
  - Scott D. Halle
  - et al.
- 2016
- ASMC 2016
Conference paper
Assessments of image-based and scatterometry-based overlay targets
- - Chiew-Seng Koay
  - Nelson Felix
  - et al.
- 2016
- SPIE Advanced Lithography 2016
Conference paper