99 results for
Robert L. Bruce- Takashi Ando
- Omobayode Fagbohungbe
- et al.
- 2025
- IEDM 2025
Invited talk
- C.L. Sung
- D. Daudelin
- et al.
- 2025
- IMW 2025
Conference paper
- 2025
- Journal of Vacuum Science and Technology A Vacuum Surfaces and Films
Paper
- Lynne Gignac
- John Bruley
- et al.
- 2025
- AReMS 2025
Talk
- 2025
- SPIE Advanced Lithography 2025
Invited talk
- 2024
- physica status solidi RRL
Paper
- Wei-Chih Chien
- Jeffrey Zheng
- et al.
- 2024
- VLSI Technology and Circuits 2024
Talk
- Gottlieb S. Oehrlein
- Stephan M. Brandstadter
- et al.
- 2024
- Journal of Vacuum Science and Technology B
Paper
- W.C. Chien
- C.L. Sung
- et al.
- 2024
- IMW 2024
Conference paper
Invited talk