Wafer-level 3D integration technology
- Steven J. Koester
- Albert M. Young
- et al.
- 2008
- IBM J. Res. Dev
Review
Publications
20 results for Roy Yu
Electromigration reliability of advanced interconnects
- C.-K. Hu
- L. Gignac
- et al.
- 2007
- International Workshop on Stress-Induced Phenomena in Metallization 2007
Conference paper3D integration-past, present and future
- Roy Yu
- 2007
- VMIC 2007
Conference paperImpact of Cu microstructure on electromigration reliability
- C.-K. Hu
- L. Gignac
- et al.
- 2007
- IITC 2007
Conference paperHybrid lithography: The marriage between optical and e-beam lithography. A method to study process integration and device performance for advanced device nodes
- Steven Steen
- Sharee J. McNab
- et al.
- 2006
- Microelectronic Engineering
PaperBEOL interconnects for 45 nm node and beyond
- R.R. Yu
- J. Doyle
- et al.
- 2005
- VMIC 2005
Conference paperLooking into the crystal ball: Future device learning using hybrid E-beam and optical lithography
- S.E. Steen
- S.J. McNab
- et al.
- 2005
- Microlithography 2005
Conference paperWafer-scale microdevice transfer/interconnect: Its application in an AFM-based data-storage system
- Michel Despont
- Ute Drechsler
- et al.
- 2004
- JMEMS
PaperWafer-scale microdevice transfer/interconnect: From a new integration method to its application in an afm-based data-storage system
- M. Despont
- U. Drechsler
- et al.
- 2003
- TRANSDUCERS 2003
Conference paperElectrical integrity of state-of-the-art 0.13 μm SOI CMOS devices and circuits transferred for three-dimensional (3D) integrated circuit (IC) fabrication
- K.W. Guarini
- A. Topol
- et al.
- 2002
- IEDM 2002
Conference paper