Patterned electrochemical deposition of copper using an electron beam
- Mark Den Heijer
- Ingrid Shao
- et al.
- 2014
- APL Materials
Paper
Publications
17 results for Ingrid Shao
Optimization of Cu damascene electrodeposition process in ULSI for yield and reliability improvement
- Ingrid Shao
- T. Cheng
- et al.
- 2013
- ECS Transactions
Conference paperMechanism study of Ag catalyzed directional etch of silicon for nanowire formation
- Ingrid Shao
- Lynne Gignac
- 2011
- ECS Meeting 2011
Conference paperStress in electrodeposited CoFe alloy films
- Ingrid Shao
- Lubomyr T. Romankiw
- et al.
- 2010
- Journal of Crystal Growth
PaperStress in electrodeposited high moment CoFe films
- I. Shao
- L. Romankiw
- et al.
- 2009
- ECS Meeting 2009
Conference paperALD approach toward electrodeposition of Sb2Te3 for phase-change memory applications
- V. Venkatasamy
- I. Shao
- et al.
- 2008
- JES
PaperDeposition and characterization of Fe0.55 Co0.45 nanowires
- I. Shao
- M.W. Chen
- et al.
- 2007
- JES
PaperNovel approach to reduce source/drain series and contact resistance in high-performance UTSOI CMOS devices using selective electrodeless CoWP or CoB process
- James Pan
- Anna Topol
- et al.
- 2007
- IEEE Electron Device Letters
PaperAn alternative low resistance MOL technology with electroplated rhodium as contact plugs for 32nm CMOS and beyond
- I. Shao
- J.M. Cotte
- et al.
- 2007
- IITC 2007
Conference paperEffect of oxygen incorporation on soft magnetic properties of iron-rich CoFe alloys
- J.W. Lam
- C. Bonhôte
- et al.
- 2004
- ECS Meeting 2004
Conference paper