A 6.7 MHz nanoelectromechanical ring oscillator using curved cantilever switches coated with amorphous carbon
- Christopher L. Ayala
- Daniel Grogg
- et al.
- 2014
- ESSDERC 2014
Conference paper
Publications
113 results for Michel Despont
Wide bandwidth room-temperature THz imaging array based on antenna-coupled MOSFET bolometer
- Thomas Morf
- Bernhard Klein
- et al.
- 2014
- Sensors and Actuators, A: Physical
PaperAmorphous carbon active contact layer for reliable nanoelectromechanical switches
- Daniel Grogg
- Christopher L. Ayala
- et al.
- 2014
- MEMS 2014
Conference paperThermal probe nanolithography: In-situ inspection, high-speed, high-resolution, 3D
- Felix Holzner
- Philip Paul
- et al.
- 2013
- EMLC 2013
Conference paperWideband planar skirt antenna and its application for the detection of terahertz radiation
- Noam Kaminski
- Dan Corcos
- et al.
- 2013
- COMCAS 2013
Conference paperDesign of a cloverleaf antenna for an antenna coupled bolometer for room temperature THz imaging
- Bernhard Klein
- Ronny Hahnel
- et al.
- 2013
- ISCDG 2013
Conference paperModelling NEM relays for digital circuit applications
- Sunil Rana
- Tian Qin
- et al.
- 2013
- ISCAS 2013
Conference paperThermal probe maskless lithography for 27.5 nm half-pitch Si technology
- Lin Lee Cheong
- Philip Paul
- et al.
- 2013
- Nano Letters
PaperRoom-temperature THz imaging based on antenna-coupled MOSFET bolometer
- Thomas Morf
- Bernhard Klein
- et al.
- 2013
- MEMS 2013
Conference paperDesign of a wide-bandwidth on-chip antenna for uncooled passive THz imaging
- Bernhard Klein
- Thomas Morf
- et al.
- 2013
- iWAT 2013
Conference paper