Characterization of room temperature recrystallization kinetics in electroplated copper thin films with concurrent x-ray diffraction and electrical resistivity measurements
- Mikhail Treger
- Christian Witt
- et al.
- 2013
- Journal of Applied Physics
Paper
Publications
156 results for Jean L. Jordan-Sweet
Effects of temperature dependent pre-amorphization implantation on NiPt silicide formation and thermal stability on Si(100)
- Ahmet S. Ozcan
- Donald Wall
- et al.
- 2013
- Applied Physics Letters
PaperThree dimensional reciprocal space measurement by x-ray diffraction using linear and area detectors: Applications to texture and defects determination in oriented thin films and nanoprecipitates
- Simon Gaudet
- Koen De Keyser
- et al.
- 2013
- JVSTA
PaperMitigating residual stress in Cu metallization
- Conal E. Murray
- Jean Jordan-Sweet
- et al.
- 2012
- Applied Physics Letters
PaperPhase transitions in Ga-Sb phase change alloys
- Simone Raoux
- Anja K. König
- et al.
- 2012
- physica status solidi (b)
PaperUnderstanding stress gradients in microelectronic metallization
- Conal E. Murray
- E. Todd Ryan
- et al.
- 2012
- Powder Diffraction
PaperAnnealing dependence of diamond-metal Schottky barrier heights probed by hard x-ray photoelectron spectroscopy
- M. Gaowei
- E.M. Muller
- et al.
- 2012
- Applied Physics Letters
PaperEvolution of stress gradients in Cu films and features induced by capping layers
- Conal E. Murray
- E.T. Ryan
- et al.
- 2012
- Microelectronic Engineering
PaperProperties of phase change materials modified by ion implantation
- Simone Raoux
- Guy M. Cohen
- et al.
- 2011
- MRS Spring Meeting 2011
Conference paperMaterials engineering for phase change random access memory
- Simone Raoux
- Huai-Yu Cheng
- et al.
- 2011
- NVMTS 2011
Conference paper