Publications

29 results for Alfred Wagner

High conductivity FIB deposited metal
- - P.G. Blauner
  - A. Wagner
- 1995
- MRS Fall Meeting 1995
Conference paper
Electrodeposited gold;real times stress and structural chance at room temperature
- - R.E. Acosta
  - I. Babich
  - et al.
- 1993
- MRS Spring Meeting 1993
Conference paper
Process latitude study of focused ion-beam-deposited gold for clear x-ray mask repair
- - Patricia G. Blauner
  - Andrew D. Dubner
  - et al.
- 1993
- Microlithography 1993
Conference paper
The role of the ion-solid interaction in ion-beam-induced deposition of gold
- - A.D. Dubner
  - A. Wagner
  - et al.
- 1991
- Journal of Applied Physics
Paper
Model for focused ion beam deposition
- - J.P. Levin
  - P.G. Blauner
  - et al.
- 1990
- Microlithography 1990
Conference paper
In situ measurement of ion-beam-induced deposition of gold
- - A.D. Dubner
  - A. Wagner
- 1989
- Journal of Applied Physics
Paper
Focused ion beam repair of lithographic masks
- - A. Wagner
  - J.P. Levin
- 1989
- Nuclear Inst. and Methods in Physics Research, B
Paper
The role of gas adsorption in ion-beam-induced deposition of gold
- - A.D. Dubner
  - A. Wagner
- 1989
- Journal of Applied Physics
Paper
Future beam-controlled processing technologies for microelectronics
- - Dieter P. Kern
  - Thomas F. Kuech
  - et al.
- 1988
- Science
Paper