High-aspect-ratio cylindrical nanopore arrays and their use for templating titania nanoposts
- Oun-Ho Park
- Joy Y. Cheng
- et al.
- 2008
- Advanced Materials
Paper
Publications
390 results for Robert Miller
Photopatternable nanoporous titania films by coassembly of diblock copolymer and chemically modified titanium alkoxide
- Oun-Ho Park
- Joy Y. Cheng
- et al.
- 2007
- ACS National Meeting 2007
Conference paperSuperior mechanical properties of dense and porous organic/inorganic hybrid thin films
- Willi Volksen
- Geraud Dubois
- et al.
- 2007
- VMIC 2007
Conference paperMolecular network reinforcement of sol-gel glasses
- Geraud Dubois
- Willi Volksen
- et al.
- 2007
- Advanced Materials
PaperSelf-aligned, self-assembled organosilicate line patterns of ∼20nm half-pitch from block copolymer mediated self-assembly
- Ho-Cheol Kim
- Joy Cheng
- et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paperFormation and photopatterning of nanoporous titania thin films
- Oun-Ho Park
- Joy Y. Cheng
- et al.
- 2007
- Applied Physics Letters
PaperPreparation of α-Halovinyl Sulfides by Eliminative Deoxygenation of α-Halosulfoxides
- R.D. Miller
- R. Hässig
- 2006
- Synthetic Communications
PaperLaser spike annealing: A novel post-porosity treatment for toughening of low-k organosilicates
- Willi Volksen
- Geraud Dubois
- et al.
- 2006
- VMIC 2006
Conference paperLaser spike annealing: A novel post-porosity treatment for significant toughening of low-k organosilicates
- Willi Volksen
- Geraud Dubois
- et al.
- 2006
- IITC 2006
Conference paperAnalysis of plasma-induced modification of ULK and eULK Materials: Dual damascene processing challenges for 45nm (κ ≤ 2.4) and beyond BEOL technologies
- N. Fuller
- M.A. Worsley
- et al.
- 2006
- IITC 2006
Conference paper