Publications

390 results for Robert Miller

Thin-film transformations and volatile products in the formation of nanoporous low- k polymethylsilsesquioxane-based dielectric
- - P. Lazzeri
  - L. Vanzetti
  - et al.
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Templating organosilicate vitrification using unimolecular self-organizing polymers: Evolution of morphology and nanoporosity development with network formation
- - Teddie Magbitang
  - Victor Y. Lee
  - et al.
- 2005
- Advanced Materials
Paper
Phase separation behavior of poly(methyl methacrylate-co-dimethylaminoethyl methacrylate)/methyl silsesquioxane hybrid nanocomposites studied by dansyl fluorescence
- - Q.R. Huang
  - Curtis W. Frank
  - et al.
- 2005
- Chemistry of Materials
Paper
Successful dual damascene integration of extreme low k materials (k < 2.0) using a novel gap fill based integration scheme
- - S.V. Nitta
  - S. Purushothaman
  - et al.
- 2004
- IEDM 2004
Conference paper
Supercritical CO₂ extraction of porogen phase: An alternative route to nanoporous dielectrics
- - J.A. Lubguban
  - S. Gangopadhyay
  - et al.
- 2004
- Journal of Materials Research
Paper
Nanoporous thin films with hydrophilicity-contrasted patterns
- - Ho-Cheol Kim
  - Cortney R. Kreller
  - et al.
- 2004
- Chemistry of Materials
Paper
Templating organosilicate vitrification using unimolecular self-organizing polymers prepared from tandem ring opening and atom transfer radical polymerizations
- - T. Magbitang
  - V.Y. Lee
  - et al.
- 2004
- Macromolecular Symposia
Conference paper
Polysilanes—a new look at some old materials
- - Robert D. Miller
- 2004
- Advanced Materials
Review
Design of a positive resist for projection lithography in the mid‐UV
- - Grant Willson
  - Robert Miller
  - et al.
- 2004
- Polymer Engineering & Science
Paper
Polysilanes: Photochemistry and deep UV lithography
- - R.D. Miller
  - G.M. Wallraff
  - et al.
- 2004
- Polymer Engineering & Science
Paper