Charge detrapping in HfO 2 high-κ gate dielectric stacks
- E. Gusev
- C. D'Emic
- 2003
- Applied Physics Letters
Paper
Publications
75 results for Christopher P. D’Emic
High Performance CMOS Fabricated on Hybrid Substrate with Different Crystal Orientations
- M. Yang
- M. Ieong
- et al.
- 2003
- IEDM 2003
Conference paperDevice Design Considerations for Ultra-Thin SOI MOSFETs
- B. Doris
- M. Ieong
- et al.
- 2003
- IEDM 2003
Conference paperRadiation-Induced Charge Trapping in Thin Al2O 3/SiOxNy/Si(100) Gate Dielectric Stacks
- J.A. Felix
- M.R. Shaneyfelt
- et al.
- 2003
- IEEE TNS
Conference paperTunnel Current Measurements on P/N Junction Diodes and Implications for Future Device Design
- Paul M. Solomon
- David J. Frank
- et al.
- 2003
- IEDM 2003
Conference paperEnergy Distribution of Interface Traps in High-K Gated MOSFETs
- J.-P. Han
- E.M. Vogel
- et al.
- 2003
- VLSI Technology 2003
Conference paperUltrathin HfO2 films grown on silicon by atomic layer deposition for advanced gate dielectrics applications
- E. Gusev
- C. Cabral Jr.
- et al.
- 2003
- Microelectronic Engineering
Conference paperPerformance dependence of CMOS on silicon substrate orientation for ultrathin oxynitride and HfO2 gate dielectrics
- Min Yang
- Evgeni P. Gusev
- et al.
- 2003
- IEEE Electron Device Letters
PaperTwo gates are better than one
- P. Solomon
- K.W. Guarini
- et al.
- 2003
- IEEE Circuits and Devices Magazine
PaperA selective etching process for chemically inert high-k metal oxides
- Katherine L. Saenger
- Harald F. Okorn-Schmidt
- et al.
- 2002
- MRS Proceedings 2002
Conference paper