Channel design and mobility enhancement in strained germanium buried channel MOSFETs
- H. Shang
- J.O. Chu
- et al.
- 2004
- VLSI Technology 2004
Conference paper
Publications
81 results for Kevin Chan
On the integration of CMOS with hybrid crystal orientations
- M. Yang
- V. Chan
- et al.
- 2004
- VLSI Technology 2004
Conference paperComparison of {311} Defect Evolution in SIMOX and Bonded SOI Materials
- A.F. Saavedra
- K.S. Jones
- et al.
- 2004
- JES
PaperConcentration dependence of boron-interstitial cluster (BIC) formation in silicon-on-insulator (SOI)
- A.F. Saavedra
- K.S. Jones
- et al.
- 2004
- MRS Proceedings 2004
Conference paperKinetics of {3 1 1} defect dissolution in silicon-on-insulator (SOI)
- A.F. Saavedra
- K.S. Jones
- et al.
- 2004
- Materials Science and Engineering: B
PaperSecondary defect formation in bonded silicon-on-insulator after boron implantation
- A.F. Saavedra
- A.C. King
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperFabrication and Mobility Characteristics of Ultra-thin Strained Si Directly on Insulator (SSDOI) MOSFETs
- K. Rim
- K.K. Chan
- et al.
- 2003
- IEDM 2003
Conference paperHigh Performance CMOS Fabricated on Hybrid Substrate with Different Crystal Orientations
- M. Yang
- M. Ieong
- et al.
- 2003
- IEDM 2003
Conference paper20 nm N + abrupt junction formation in Strained Si/Si 1-xGe x MOS device
- K.L. Lee
- F. Cardone
- et al.
- 2003
- IEDM 2003
Conference paperIntegration of 1GB/sec Silicon Lateral Trench Photodetector with High-Performance CMOS
- M. Yang
- J. Schaub
- et al.
- 2003
- VLSI Technology 2003
Conference paper