Statistical measurement of random telegraph noise and its impact in scaled-down high-κ/metal-gate MOSFETs
- H. Miki
- N. Tega
- et al.
- 2012
- IEDM 2012
Conference paper
Publications
11 results for K. Torii
Voltage and temperature dependence of random telegraph noise in highly scaled HKMG ETSOI nFETs and its impact on logic delay uncertainty
- H. Miki
- M. Yamaoka
- et al.
- 2012
- VLSI Technology 2012
Conference paperEvaluation methodology for random telegraph noise effects in SRAM arrays
- M. Yamaoka
- Hiroshi Miki
- et al.
- 2011
- IEDM 2011
Conference paperUnderstanding short-term BTI behavior through comprehensive observation of gate-voltage dependence of RTN in highly scaled high-κ / metal-gate pFETs
- Hiroshi Miki
- M. Yamaoka
- et al.
- 2011
- VLSI Technology 2011
Conference paperImpact of HK / MG stacks and future device scaling on RTN
- Naoki Tega
- Hiroshi Miki
- et al.
- 2011
- IRPS 2011
Conference paperCritical dimension scanning electron microscope local overlay measurement and its application for double patterning of complex shapes
- Shoji Hotta
- Takumichi Sutani
- et al.
- 2011
- J. Micro/Nanolithogr. MEMS MOEMS
PaperHysteretic drain-current behavior due to random telegraph noise in scaled-down FETs with high-κ/metal-gate stacks
- Hiroshi Miki
- Naoki Tega
- et al.
- 2010
- IEDM 2010
Conference paperCD-SEM metrology of spike detection on sub-40 nm contact holes
- Yoshinori Momonoi
- Taro Osabe
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paperSpatial signature in local overlay measurements - "what CD-SEM can tell us and optical measurements can not"
- Scott Halle
- Daniel Moore
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paperReduction of random telegraph noise in high-κ / metal-gate stacks for 22 nm generation FETs
- N. Tega
- H. Miki
- et al.
- 2009
- IEDM 2009
Conference paper