Fully scaled 0.5 μm MOS circuits by synchrotron radiation X-ray lithography: Devices fabrication and overlay evaluation
- J. Silverman
- V. Dimilia
- et al.
- 1989
- Microelectronic Engineering
Paper
Publications
15 results for J. Silverman
Polymethyl methacrylate resist sensitivity enhancement in x-ray lithography by in situ polymerization
- W.-T. Liu
- J.C. Corelli
- et al.
- 1984
- Applied Physics Letters
PaperSynchrotrom radiation X-ray lithography
- R.P. Haelbich
- J. Silverman
- et al.
- 1984
- Nuclear Instruments and Methods In Physics Research
PaperSynchrotron radiation x-ray lithography: Recent results
- Jerome P. Silverman
- Rolf P. Haelbich
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperX-ray lithography exposures using synchrotron radiation
- Jerome P. Silverman
- Rolf P. Haelbich
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper