Influence of surface absorption characteristics on reactively sputtered films grown in the biased and unbiased modes
- Harold F. Winters
- Eric Kay
- 2003
- Journal of Applied Physics
Paper
Publications
89 results for Eric Kay
Gas analysis in films by laser-induced flash evaporation followed by mass spectrometry
- Harold F. Winters
- Eric Kay
- 2003
- Journal of Applied Physics
PaperPlasma diagnostics of an rf-sputtering glow discharge
- J.W. Coburn
- Eric Kay
- 2003
- Applied Physics Letters
PaperGlow-discharge mass spectrometry - Technique for determining elemental composition profiles in solids
- J.W. Coburn
- E. Taglauer
- et al.
- 2003
- Journal of Applied Physics
PaperMatrix spectroscopy of Ag, Ta, W, and Mo trapped in Ar and Xe using a triode sputtering source
- F. Schoch
- E. Kay
- 2003
- The Journal of Chemical Physics
PaperInelastic Electron Tunneling Spectroscopy of a Chemically Modified Surface
- A. Diaz
- U. Hetzler
- et al.
- 2002
- JACS
PaperPlasma Polymerization of Ethylene and the Series of Fluoroethylenes: Plasma Effluent Mass Spectrometry and ESCA Studies
- A. Dilks
- E. Kay
- 2002
- Macromolecules
PaperLaser-induced coalescence of gold clusters in fluorocarbon composite thin films
- Paul B. Comita
- Eric Kay
- et al.
- 1994
- Applied Surface Science
PaperPyrolysis and laser ablation of plasma-polymerized fluorocarbon films: Effects of gold particles
- William R. Creasy
- Jeffrey A. Zimmerman
- et al.
- 1992
- Journal of Applied Physics
PaperLaser coalescence of gold clusters in gold-fluorocarbon composite films
- P.B. Comita
- W. Jacob
- et al.
- 1992
- SPIE Microelectronic Processing Integration 1992
Conference paper