Imaging at high beam energies in the scanning electron microscope
- L. Gignac
- S.H. Boettcher
- et al.
- 2006
- M&M 2006
Conference paper
Publications
52 results for O.C. Wells
The history and future of the SEM - A personal view
- Oliver C. Wells
- 2006
- M&M 2006
Conference paperImaging and analysis of subsurface Cu interconnects by detecting backscattered electrons in the scanning electron microscope
- L. Gignac
- M. Kawasaki
- et al.
- 2005
- Journal of Applied Physics
PaperTop-down topography of deeply etched silicon in the scanning electron microscope
- Oliver C. Wells
- Conal E. Murray
- et al.
- 2004
- Review of Scientific Instruments
PaperApplications of image diagnostics to metrology quality assurance and process control
- John A. Allgair
- Victor V. Boksha
- et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Conference paperCollector turret for scanning electron microscope
- Oliver C. Wells
- Conrad G. Bremer
- 2003
- Review of Scientific Instruments
PaperCoating, mechanical constraints, and pressure effects on electromigration
- N.G. Ainslie
- F.M. D'Heurle
- et al.
- 2003
- Applied Physics Letters
PaperLow-loss image for surface scanning electron microscope
- Oliver C. Wells
- 2003
- Applied Physics Letters
PaperReversible hillock growth in thin films
- S.K. Lahiri
- O.C. Wells
- 2003
- Applied Physics Letters
PaperNew contrast mechanism for scanning electron microscope
- Oliver C. Wells
- 2003
- Applied Physics Letters
Paper