Characteristics of ultrathin Ta and TaN films
- S.M. Rossnagel
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
24864 results for Exploratory Science
Low stress development of poly(methylmethacrylate) for high aspect ratio structures
- M.J. Rooks
- E. Kratschmer
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- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperGrowth dynamics of titanium silicide nanowires observed with low-energy electron microscopy
- P.A. Bennett
- B. Ashcroft
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- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperTexture and resistivity of dilute binary Cu(Al), Cu(In), Cu(Ti), Cu(Nb), Cu(Ir), and Cu(W) allow thin films
- A. Gungor
- K. Barmak
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- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperProbing surface and bulk chemistry in resist films using near edge x-ray absorption fine structure
- Joseph L. Lenhart
- Ronald L. Jones
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- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperBayesian methods for change-point detection in long-range dependent processes
- Bonnie K. Ray
- Ruey S. Tsay
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- Journal of Time Series Analysis
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- K.W. Guarini
- C.T. Black
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperLocalized and directed lateral growth of carbon nanotubes from a porous template
- S.J. Wind
- R. Martel
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperHybrid field-effect transistor based on a low-temperature melt-processed channel layer
- D.B. Mitzi
- C. Dimitrakopoulos
- et al.
- 2002
- Advanced Materials
PaperAttentive billboards: Towards to video based customer behavior understanding
- I. Haritaoglu
- M. Flickner
- 2002
- WACV 2002
Conference paper