Publications

509 results at JES

The Fabrication of High Precision Nozzles by the Anisotropic Etching of (100) Silicon
- - E. Bassous
  - E.F. Baran
- 2019
- JES
Paper
Parameter Dependence of RIE Induced Radiation Damage in Silicon Dioxide
- - L.M. Ephrarh
  - D.J. Dimaria
  - et al.
- 2019
- JES
Paper
RIE Contamination of Etched Silicon Surfaces
- - L.M. Ephrath
  - R.S. Bennett
- 2019
- JES
Paper
Structural Composition of Polymers Relative to Their Plasma Etch Characteristics
- - Lester A. Pederson
- 2019
- JES
Paper
Solar Cells on Large-Grain GaAs Thin Films
- - S.M. Vernon
  - A.E. Blakeslee
  - et al.
- 2019
- JES
Paper
I. Interaction of Al Films with O₂ at Low Pressures
- - Jean Grimblot
  - Jerome M. Eldridge
- 2019
- JES
Paper
Control of Plasma Etch Profiles with Plasma Sheath Electric Field and RF Power Density
- - R.S. Horwath
- 2019
- JES
Paper
Difluorocarbene Emission Spectra from Fluorocarbon Plasmas and its Relationship to Fluorocarbon Polymer Formation
- - M.M. Millard
  - E. Kay
- 2019
- JES
Paper
Critical angles for channeling of boron ions implanted into single-crystal silicon
- - Chanahae Park
  - Kevin M. Klein
  - et al.
- 2019
- JES
Paper
Computer Simulation of Oxygen Segregation in CZ/MCZ Silicon Crystals and Comparison with Experimental Results
- - W.E. Langlois
- 2019
- JES
Paper