Development of APSM resists for sub-200 nm contact holes
- M. Rajaratnam
- M. Reilly
- et al.
- 1999
- Microelectronic Engineering
Paper
Publications
24866 results for Exploratory Science
Characteristics of chemical vapor deposition diamond films for x-ray mask substrates
- Cameron J. Brooks
- Lynn A. Powers
- et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperRelationship between the slope of the HD curve and the fundamental resist process contrast
- Timothy A. Brunner
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperFabrication of multilayer ferroelectric films
- Deborah A. Neumayer
- Peter R. Duncombe
- et al.
- 1999
- Integrated Ferroelectrics
PaperThe mechanism of antiferromagnetism in chromium
- P.M. Marcus
- S.L. Qiu
- et al.
- 1999
- Journal of Physics Condensed Matter
PaperObservation of field-periodic magneto-conductance oscillations in a GaAs/Ga0.77Al0.23As heterojunction
- E.J. Pakulis
- 1999
- Semiconductor Science and Technology
PaperPoly(lactides) with controlled molecular architecture initiated from hydroxyl functional dendrimers and the effect on the hydrodynamic volume
- Björn Atthoff
- Mikael Trollsås
- et al.
- 1999
- Macromolecular Chemistry and Physics
PaperC60 solid state rotational dynamics and production and EPR spectroscopy of fullerenes containing metal atoms
- R.D. Johnson
- C.S. Yannoni
- et al.
- 1999
- Nanotechnology
PaperInversion of an integral transform associated with tomography in radar detection
- E. Feig
- F.P. Greenleaf
- 1999
- Inverse Problems
PaperQuasi-bound states and resonances in heterostructures
- P.J. Price
- 1999
- Microelectronics Journal
Paper