Extendibility of Cu damascene to 0.1 μm wide interconnections
- C.-K. Hu
- K.Y. Lee
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paper
Publications
24867 results for Exploratory Science
Templating nanoporosity in organosilicates using well-defined branched macromolecules
- J.L. Hedrick
- C.J. Hawker
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- 1998
- MRS Spring Meeting 1998
Conference paperThickness dependent perpendicular magnetic domain patterns in sputtered epitaxial FePt(001) L10 films
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- L. Folks
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- 1998
- MRS Spring Meeting 1998
Conference paperCorrosion protection of Cu, Fe, Mn and Co surfaces
- J.E.E. Baglin
- A.J. Kellock
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperIntegration issues for diamond like carbon in a copper damascene process flow
- A. Grill
- C.V. Jahnes
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperElectrical test sites for AMLCD-TFT array process characterization
- E.G. Colgan
- R.J. Polastre
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- 1998
- MRS Spring Meeting 1998
Conference paperIs selective CVD an improvement for the titanium silicide process in sub-quarter micron technology? A phase formation study using x-ray diffraction
- R.A. Roy
- Cryil Cabral Jr.
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperHigh conductivity gate metallurgy for TFT/LCD's
- P.M. Fryer
- E.G. Colgan
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperProperties development during curing of low dielectric-constant spin-on glasses
- R.F. Cook
- E. Liniger
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperPrinting patterns of proteins
- A. Bernard
- E. Delamarche
- et al.
- 1998
- Langmuir
Paper