Plasma-etching processes for ULSI semiconductor circuits
- M. Armacost
- P.D. Hoh
- et al.
- 1999
- IBM J. Res. Dev
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Publications
25372 results for Science
Resonant wavefunctions and exchange effect in nanostructures
- Peter J. Price
- 1999
- Superlattices and Microstructures
PaperAb initio dynamics of rapid fracture
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- D. Brodbeck
- et al.
- 1999
- Modelling and Simulation in Materials Science and Engineering
PaperInterhalogen Plasma Chemistries for the Etching of NiMnSb
- H. Cho
- K.B. Jung
- et al.
- 1999
- Electrochemical and Solid-State Letters
PaperRelationship between the slope of the HD curve and the fundamental resist process contrast
- Timothy A. Brunner
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperMethylene imino radical H2CN•: Matrix isolation ESR and density functional theory study
- Paul H. Kasai
- Leif A. Eriksson
- 1999
- Molecular Physics
PaperPatterning of NiFe and NiFeCo in CO/NH3 high density plasmas
- K.B. Jung
- J. Hong
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperInterface morphology in strained layer epitaxy of Si/Si1-xGex layers studied by x-ray scattering under grazing incidence and atomic force microscopy
- Z. Kovats
- T. Salditt
- et al.
- 1999
- Journal of Physics D: Applied Physics
PaperHigh-density data storage based on the atomic force microscope
- H. Jonathon Mamin
- Robert P. Ried
- et al.
- 1999
- Proceedings of the IEEE
PaperPoly(lactides) with controlled molecular architecture initiated from hydroxyl functional dendrimers and the effect on the hydrodynamic volume
- Björn Atthoff
- Mikael Trollsås
- et al.
- 1999
- Macromolecular Chemistry and Physics
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