Dopant diffusion in silicides: Effect of diffusion paths
- Carol Stanis
- J.M. Cotte
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Spin superlattice formation in ZnSe-based diluted magnetic semiconductor heterostructures
- B.T. Jonker
- W.C. Chou
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperAn isotope approach to characterization of microwave water plasma modified polyimide surfaces
- N.J. Chou
- A.D. Marwick
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe use of secondary ion mass spectrometry to investigate copolymer enhanced adhesion between immiscible polymers
- V.R. Deline
- H.R. Brown
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperHelium plasma enhanced chemical vapor deposited oxides and nitrides: Process mechanisms and applications in advanced device structures
- A.A. Bright
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperCollimated magnetron sputter deposition
- S.M. Rossnagel
- D.J. Mikalsen
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThermal stress-induced and electromigration-induced void-open failures in Al and Al-Cu fine lines
- T. Kwok
- K.K. Chan
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperImages of a microelectronic device with the X1-SPEM, a first generation scanning photoemission microscope at the National Synchrotron Light Source
- H. Ade
- J. Kirz
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSurface etching and roughening in integrated processing of thermal oxides
- M. Offenberg
- M. liehr
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperRelation of thickness and some physical properties of NiFe thin films
- R.M. Valletta
- G. Guthmiller
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper